The Small Business Innovation Research (SBIR) Program for CHIPS for America CHIPS Metrology seeks applications from eligible applicants to explore the technical merit or feasibility of an innovative idea or technology with the aim of developing a viable product or service that will be introduced to the commercial microelectronics marketplace. This NOFO contains multiple topics on research projects for critically needed measurement services, tools, and instrumentation; innovative manufacturing metrologies; novel assurance and provenance technologies and advanced metrology research and development (R) testbeds to help secure U.S. leadership in the global semiconductor industry.